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Berge, John
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Vorobiev, A., Berge, J., Gevorgian, S., Löffler, M. & Olsson, E. (2011). Effect of interface roughness on acoustic loss in tunable thin film bulk acoustic wave resonators. Journal of Applied Physics, 110(2)
Öppna denna publikation i ny flik eller fönster >>Effect of interface roughness on acoustic loss in tunable thin film bulk acoustic wave resonators
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2011 (Engelska)Ingår i: Journal of Applied Physics, ISSN 0021-8979, E-ISSN 1089-7550, Vol. 110, nr 2Artikel i tidskrift (Refereegranskat) Published
Abstract [en]

Tunable 5.2 GHz bulk acoustic wave resonators utilizing Ba(x)Sr(1-x)TiO(3) ferroelectric films with similar intrinsic properties but different interface roughness are fabricated and characterized. Increase in roughness from 3.2 nm up to 6.9 nm results in reduction in Q-factor from 350 down to 150 due to extrinsic acoustic losses caused by wave scattering at reflections from rough interfaces and other mechanisms associated with roughness. The increased roughness is a result of distortion of Pt bottom electrode caused by formation of heterogeneous enclosures of TiO(2-x) in the Pt layer. (C) 2011 American Institute of Physics. [doi: 10.1063/1.3610513]

Nationell ämneskategori
Materialteknik
Identifikatorer
urn:nbn:se:umu:diva-140836 (URN)
Tillgänglig från: 2017-10-19 Skapad: 2017-10-19 Senast uppdaterad: 2018-06-09
Berge, J. & Gevorgian, S. (2011). Tunable bulk acoustic wave resonators based on Ba0.25Sr0.75TiO3 thin films and a HfO2/SiO2 Bragg reflector. IEEE Transactions on Ultrasonics, Ferroelectrics and Frequency Control, 58(12), 2768-2771
Öppna denna publikation i ny flik eller fönster >>Tunable bulk acoustic wave resonators based on Ba0.25Sr0.75TiO3 thin films and a HfO2/SiO2 Bragg reflector
2011 (Engelska)Ingår i: IEEE Transactions on Ultrasonics, Ferroelectrics and Frequency Control, ISSN 0885-3010, E-ISSN 1525-8955, Vol. 58, nr 12, s. 2768-2771Artikel i tidskrift (Refereegranskat) Published
Abstract [en]

A switchable and tunable bulk acoustic wave resonator based on a paraelectric phase Ba0.25Sr0.75TiO3 thin film and an all-dielectric HfO2/SiO2 Bragg reflector is presented. The achieved tuning range (3.8%) and effective electromechanical coupling coefficient (7.1%) are the highest reported for solidly mounted tunable bulk acoustic wave resonators. The non-conductive Bragg reflector stack provides excellent integration possibilities.

Nationell ämneskategori
Materialteknik
Identifikatorer
urn:nbn:se:umu:diva-140835 (URN)
Tillgänglig från: 2017-10-19 Skapad: 2017-10-19 Senast uppdaterad: 2018-06-09
Berge, J., Vorobiev, A. & Gevorgian, S. (2010). Design considerations for tunable bulk acoustic wave resonators based on paraelectric phase BaxSr1-xTiO3 thin films. In: : . Paper presented at The 19th IEEE International Symposium on the Applications of Ferroelectrics, August 9-12, 2010, Edinburgh, Scotland.
Öppna denna publikation i ny flik eller fönster >>Design considerations for tunable bulk acoustic wave resonators based on paraelectric phase BaxSr1-xTiO3 thin films
2010 (Engelska)Konferensbidrag, Muntlig presentation med publicerat abstract (Refereegranskat)
Abstract [en]

Paraelectric phase BaxSr1-xTiO3 (BSTO) is due to the pronounced field induced piezoelectric effect a promising candidate to realize hysteresis-free tunable thin film bulk acoustic wave resonators (TFBARs) at GHz frequencies. Compared to the conventional fixed-frequency TFBAR technology, mainly based on piezoelectric AlN films, the design of tunable BSTO based resonators require additional considerations due to the demanding conditions necessary for the growth of the BSTO active layer (high temperature, O2 ambient). In this work a number of problems and possible solutions are presented for the specific case of solidly mounted resonators based on an acoustic Bragg reflector structure. Simulation results for a proposed tunable resonator based on a BSTO film and a SiO2/HfO2 reflector stack co-optimized for both longitudinal and shear waves are presented and compared to simulations and existing experimental data from other structures.

Nyckelord
ferroelectric, microwave, acoustic, resonator
Nationell ämneskategori
Materialteknik
Identifikatorer
urn:nbn:se:umu:diva-140837 (URN)
Konferens
The 19th IEEE International Symposium on the Applications of Ferroelectrics, August 9-12, 2010, Edinburgh, Scotland
Tillgänglig från: 2017-10-19 Skapad: 2017-10-19 Senast uppdaterad: 2018-06-09
Vorobiev, A., Berge, J., Norling, M. & Gevorgian, S. (2010). Silicon substrate integration of BST based tunable TFBARs using all-dielectric SiO2/AlN Bragg reflectors. In: 10th Topical Meeting on Silicon Monolithic Integrated Circuits in RF Systems (SiRF 2010) - Digest of Papers: . Paper presented at SiRF 2010, New Orleans, LA, USA (pp. 41-44).
Öppna denna publikation i ny flik eller fönster >>Silicon substrate integration of BST based tunable TFBARs using all-dielectric SiO2/AlN Bragg reflectors
2010 (Engelska)Ingår i: 10th Topical Meeting on Silicon Monolithic Integrated Circuits in RF Systems (SiRF 2010) - Digest of Papers, 2010, s. 41-44Konferensbidrag, Publicerat paper (Refereegranskat)
Abstract [en]

Integration possibilities of BaxSr1-xTiO3 (BST) based tunable Thin Film Bulk Acoustic Wave Resonators (TFBAR) using all-dielectric SiO2/AlN Bragg reflectors deposited on a high resistivity silicon substrate are considered. SiO2/AlN reflectors withstand the high deposition temperature (>600C) of the BST films opening up possibilities for heterogeneous integration of complex microwave circuits. © 2010 IEEE.

Nyckelord
Acoustic Bragg reflector ferroelectric, FBAR, Induced piezoelectric effect, Si-integration, TFBAR
Nationell ämneskategori
Materialteknik
Identifikatorer
urn:nbn:se:umu:diva-140839 (URN)
Konferens
SiRF 2010, New Orleans, LA, USA
Tillgänglig från: 2017-10-19 Skapad: 2017-10-19 Senast uppdaterad: 2018-06-09
Berge, J., Norling, M., Vorobiev, A. & Gevorgian, S. (2010). The effect of Bragg reflectors on the electromechanical performance of parallel-plate ferroelectric capacitors. In: IOP Conference Series: Materials Science and Engineering - Fundamentals and Technology of Multifunctional Oxide Thin Films. Paper presented at Symposium G, EMRS 2009 Spring Meeting, 8-12 June 2009, Strasbourg, France.
Öppna denna publikation i ny flik eller fönster >>The effect of Bragg reflectors on the electromechanical performance of parallel-plate ferroelectric capacitors
2010 (Engelska)Ingår i: IOP Conference Series: Materials Science and Engineering - Fundamentals and Technology of Multifunctional Oxide Thin Films, 2010Konferensbidrag, Publicerat paper (Refereegranskat)
Abstract [en]

Parallel-plate capacitors based on ferroelectric thin films are considered as high density capacitors and varactors. Due to the small thickness of the ferroelectric films, typically less than 1.0 mu m, high electric fields are generated even at relatively low voltages inducing piezoelectric effect associated with electrostriction. This induced piezoelectric effect has negative impact on ferroelectric capacitors since it causes extra loss (electroacoustic transformation of microwave energy). In this work the use of Bragg reflectors between the substrate and ferroelectric film is proposed as a possible way of suppression of the enhanced losses associated with the piezoelectric activity of the ferroelectric film.

Nationell ämneskategori
Materialteknik
Identifikatorer
urn:nbn:se:umu:diva-140838 (URN)
Konferens
Symposium G, EMRS 2009 Spring Meeting, 8-12 June 2009, Strasbourg, France
Tillgänglig från: 2017-10-19 Skapad: 2017-10-19 Senast uppdaterad: 2018-06-09
Norling, M., Berge, J. & Gevorgian, S. (2009). Parameter extraction for tunable TFBARs based on BaxSr1-xTiO3. In: IEEE MTT-S International Microwave Symposium Digest 2009: . Paper presented at IEEE International Microwave Symposium (IMS) 2009.
Öppna denna publikation i ny flik eller fönster >>Parameter extraction for tunable TFBARs based on BaxSr1-xTiO3
2009 (Engelska)Ingår i: IEEE MTT-S International Microwave Symposium Digest 2009, 2009Konferensbidrag, Publicerat paper (Refereegranskat)
Nyckelord
ferroelectric, microwave, acoustic, resonator
Nationell ämneskategori
Materialteknik
Identifikatorer
urn:nbn:se:umu:diva-140842 (URN)
Konferens
IEEE International Microwave Symposium (IMS) 2009
Tillgänglig från: 2017-10-19 Skapad: 2017-10-19 Senast uppdaterad: 2018-06-09
Vorobiev, A., Berge, J. & Gevorgian, S. (2008). Comparative study of microstructure and microwave dielectric response of BaxSr1-xTiO3 films grown by pulsed laser deposition and magnetron sputtering. In: : . Paper presented at International conference on Electroceramics, 31 August - 3 September 2008, Manchester, UK.
Öppna denna publikation i ny flik eller fönster >>Comparative study of microstructure and microwave dielectric response of BaxSr1-xTiO3 films grown by pulsed laser deposition and magnetron sputtering
2008 (Engelska)Konferensbidrag, Muntlig presentation med publicerat abstract (Refereegranskat)
Nationell ämneskategori
Materialteknik
Identifikatorer
urn:nbn:se:umu:diva-140846 (URN)
Konferens
International conference on Electroceramics, 31 August - 3 September 2008, Manchester, UK
Tillgänglig från: 2017-10-19 Skapad: 2017-10-19 Senast uppdaterad: 2018-06-09
Turalchuk, P., Vendik, I., Vendik, O. & Berge, J. (2008). Electrically tunable bulk acoustic filters with induced piezoelectric effect in BSTO film. In: Proc. European Microwave Conference 2008: . Paper presented at EuMC, Amsterdam, Netherlands, 27-31 Oct. 2008. (pp. 1695-1698).
Öppna denna publikation i ny flik eller fönster >>Electrically tunable bulk acoustic filters with induced piezoelectric effect in BSTO film
2008 (Engelska)Ingår i: Proc. European Microwave Conference 2008, 2008, s. 1695-1698Konferensbidrag, Publicerat paper (Refereegranskat)
Nationell ämneskategori
Materialteknik
Identifikatorer
urn:nbn:se:umu:diva-140844 (URN)
Konferens
EuMC, Amsterdam, Netherlands, 27-31 Oct. 2008.
Tillgänglig från: 2017-10-19 Skapad: 2017-10-19 Senast uppdaterad: 2018-06-09
Berge, J., Norling, M., Vorobiev, A. & Gevorgian, S. (2008). Field and temperature dependent parameters of the dc field induced resonances in BaxSr1-xTiO3-based tunable thin film bulk acoustic resonators. Journal of Applied Physics, 103(6)
Öppna denna publikation i ny flik eller fönster >>Field and temperature dependent parameters of the dc field induced resonances in BaxSr1-xTiO3-based tunable thin film bulk acoustic resonators
2008 (Engelska)Ingår i: Journal of Applied Physics, ISSN 0021-8979, E-ISSN 1089-7550, Vol. 103, nr 6Artikel i tidskrift (Refereegranskat) Published
Nationell ämneskategori
Materialteknik
Identifikatorer
urn:nbn:se:umu:diva-140843 (URN)
Tillgänglig från: 2017-10-19 Skapad: 2017-10-19 Senast uppdaterad: 2018-06-09
Vendik, I., Turalchuk, P., Vendik, O. & Berge, J. (2008). Modeling tunable bulk acoustic resonators based on induced piezoelectric effect in BaTiO[sub 3] and Ba[sub 0.25]Sr[sub 0.75]TiO[sub 3] films. Journal of Applied Physics, 103(1), 014107-1
Öppna denna publikation i ny flik eller fönster >>Modeling tunable bulk acoustic resonators based on induced piezoelectric effect in BaTiO[sub 3] and Ba[sub 0.25]Sr[sub 0.75]TiO[sub 3] films
2008 (Engelska)Ingår i: Journal of Applied Physics, ISSN 0021-8979, E-ISSN 1089-7550, Vol. 103, nr 1, s. 014107-1Artikel i tidskrift (Refereegranskat) Published
Nationell ämneskategori
Materialteknik
Identifikatorer
urn:nbn:se:umu:diva-140845 (URN)
Tillgänglig från: 2017-10-19 Skapad: 2017-10-19 Senast uppdaterad: 2018-06-09

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