umu.sePublikasjoner
Endre søk
RefereraExporteraLink to record
Permanent link

Direct link
Referera
Referensformat
  • apa
  • ieee
  • modern-language-association-8th-edition
  • vancouver
  • Annet format
Fler format
Språk
  • de-DE
  • en-GB
  • en-US
  • fi-FI
  • nn-NO
  • nn-NB
  • sv-SE
  • Annet språk
Fler språk
Utmatningsformat
  • html
  • text
  • asciidoc
  • rtf
Gas equilibration gas modulation refractometry for assessment of pressure with sub-ppm precision
Umeå universitet, Teknisk-naturvetenskapliga fakulteten, Institutionen för fysik.
Umeå universitet, Teknisk-naturvetenskapliga fakulteten, Institutionen för fysik. National Metrology Institute VTT MIKES, Finland.
Umeå universitet, Teknisk-naturvetenskapliga fakulteten, Institutionen för fysik.
Vise andre og tillknytning
2019 (engelsk)Inngår i: Journal of Vacuum Science and Technology B: Nanotechnology and Microelectronics, ISSN 2166-2746, E-ISSN 2166-2754, Vol. 37, nr 4, artikkel-id 042901Artikkel i tidsskrift (Fagfellevurdert) Published
Abstract [en]

Gas modulation refractometry (GAMOR) is a methodology that, by performing repeated reference assessments with the measurement cavity being evacuated while the reference cavity is held at a constant pressure, can mitigate drifts in dual Fabry-Perot cavity based refractometry. A novel realization of GAMOR, referred to as gas equilibration GAMOR, that outperforms the original realization of GAMOR, here referred to as single cavity modulated GAMOR (SCM-GAMOR), is presented. In this, the reference measurements are carried out by equalizing the pressures in the two cavities, whereby the time it takes to reach adequate conditions for the reference measurements has been reduced. This implies that a larger fraction of the measurement cycle can be devoted to data acquisition, which reduces white noise and improves on its short-term characteristics. The presented realization also encompasses a new cavity design with improved temperature stabilization and assessment. This has contributed to improved long-term characteristics of the GAMOR methodology. The system was characterized with respect to a dead weight pressure balance. It was found that the system shows a significantly improved precision with respect to SCM-GAMOR for all integration times. For a pressure of 4303 Pa, it can provide a response for short integration times (up to 10 min) of 1.5 mPa (cycle)1/2, while for longer integration times (up to 18 h), it shows an integration time-independent Allan deviation of 1mPa (corresponding to a precision, defined as twice the Allan deviation, of 0.5 ppm), exceeding the original SCM-GAMOR system by a factor of 2 and 8, respectively. When used for low pressures, it can provide a precision in the sub-mPa region; for the case with an evacuated measurement cavity, the system provided, for up to 40 measurement cycles (ca. 1.5 h), a white noise of 0.7 mPa (cycle)1/2, and a minimum Allan deviation of 0.15mPa. It shows a purely linear response in the 2.8-10.1 kPa range. This implies that the system can be used for the transfer of calibration over large pressure ranges with exceptional low uncertainty.

sted, utgiver, år, opplag, sider
American Institute of Physics (AIP), 2019. Vol. 37, nr 4, artikkel-id 042901
HSV kategori
Identifikatorer
URN: urn:nbn:se:umu:diva-165111DOI: 10.1116/1.5090860ISI: 000492053600016OAI: oai:DiVA.org:umu-165111DiVA, id: diva2:1369973
Tilgjengelig fra: 2019-11-13 Laget: 2019-11-13 Sist oppdatert: 2019-11-13bibliografisk kontrollert

Open Access i DiVA

fulltext(1631 kB)30 nedlastinger
Filinformasjon
Fil FULLTEXT01.pdfFilstørrelse 1631 kBChecksum SHA-512
af30e53838829b14bc8a2b2c693447548e9fabf29302555a4dde994114be741640e70ecd1d015032f7f9242bdd84f0e0e4e991c79d9da5927edd82f0d9d3b02c
Type fulltextMimetype application/pdf

Andre lenker

Forlagets fulltekst

Personposter BETA

Silander, IsakHausmaninger, ThomasForssén, ClaytonAxner, Ove

Søk i DiVA

Av forfatter/redaktør
Silander, IsakHausmaninger, ThomasForssén, ClaytonAxner, Ove
Av organisasjonen
I samme tidsskrift
Journal of Vacuum Science and Technology B: Nanotechnology and Microelectronics

Søk utenfor DiVA

GoogleGoogle Scholar
Totalt: 30 nedlastinger
Antall nedlastinger er summen av alle nedlastinger av alle fulltekster. Det kan for eksempel være tidligere versjoner som er ikke lenger tilgjengelige

doi
urn-nbn

Altmetric

doi
urn-nbn
Totalt: 64 treff
RefereraExporteraLink to record
Permanent link

Direct link
Referera
Referensformat
  • apa
  • ieee
  • modern-language-association-8th-edition
  • vancouver
  • Annet format
Fler format
Språk
  • de-DE
  • en-GB
  • en-US
  • fi-FI
  • nn-NO
  • nn-NB
  • sv-SE
  • Annet språk
Fler språk
Utmatningsformat
  • html
  • text
  • asciidoc
  • rtf