umu.sePublikationer
Ändra sökning
RefereraExporteraLänk till posten
Permanent länk

Direktlänk
Referera
Referensformat
  • apa
  • ieee
  • modern-language-association-8th-edition
  • vancouver
  • Annat format
Fler format
Språk
  • de-DE
  • en-GB
  • en-US
  • fi-FI
  • nn-NO
  • nn-NB
  • sv-SE
  • Annat språk
Fler språk
Utmatningsformat
  • html
  • text
  • asciidoc
  • rtf
Gas equilibration gas modulation refractometry for assessment of pressure with sub-ppm precision
Umeå universitet, Teknisk-naturvetenskapliga fakulteten, Institutionen för fysik.
Umeå universitet, Teknisk-naturvetenskapliga fakulteten, Institutionen för fysik. National Metrology Institute VTT MIKES, Finland.
Umeå universitet, Teknisk-naturvetenskapliga fakulteten, Institutionen för fysik.
Visa övriga samt affilieringar
2019 (Engelska)Ingår i: Journal of Vacuum Science and Technology B: Nanotechnology and Microelectronics, ISSN 2166-2746, E-ISSN 2166-2754, Vol. 37, nr 4, artikel-id 042901Artikel i tidskrift (Refereegranskat) Published
Abstract [en]

Gas modulation refractometry (GAMOR) is a methodology that, by performing repeated reference assessments with the measurement cavity being evacuated while the reference cavity is held at a constant pressure, can mitigate drifts in dual Fabry-Perot cavity based refractometry. A novel realization of GAMOR, referred to as gas equilibration GAMOR, that outperforms the original realization of GAMOR, here referred to as single cavity modulated GAMOR (SCM-GAMOR), is presented. In this, the reference measurements are carried out by equalizing the pressures in the two cavities, whereby the time it takes to reach adequate conditions for the reference measurements has been reduced. This implies that a larger fraction of the measurement cycle can be devoted to data acquisition, which reduces white noise and improves on its short-term characteristics. The presented realization also encompasses a new cavity design with improved temperature stabilization and assessment. This has contributed to improved long-term characteristics of the GAMOR methodology. The system was characterized with respect to a dead weight pressure balance. It was found that the system shows a significantly improved precision with respect to SCM-GAMOR for all integration times. For a pressure of 4303 Pa, it can provide a response for short integration times (up to 10 min) of 1.5 mPa (cycle)1/2, while for longer integration times (up to 18 h), it shows an integration time-independent Allan deviation of 1mPa (corresponding to a precision, defined as twice the Allan deviation, of 0.5 ppm), exceeding the original SCM-GAMOR system by a factor of 2 and 8, respectively. When used for low pressures, it can provide a precision in the sub-mPa region; for the case with an evacuated measurement cavity, the system provided, for up to 40 measurement cycles (ca. 1.5 h), a white noise of 0.7 mPa (cycle)1/2, and a minimum Allan deviation of 0.15mPa. It shows a purely linear response in the 2.8-10.1 kPa range. This implies that the system can be used for the transfer of calibration over large pressure ranges with exceptional low uncertainty.

Ort, förlag, år, upplaga, sidor
American Institute of Physics (AIP), 2019. Vol. 37, nr 4, artikel-id 042901
Nationell ämneskategori
Annan elektroteknik och elektronik
Identifikatorer
URN: urn:nbn:se:umu:diva-165111DOI: 10.1116/1.5090860ISI: 000492053600016OAI: oai:DiVA.org:umu-165111DiVA, id: diva2:1369973
Tillgänglig från: 2019-11-13 Skapad: 2019-11-13 Senast uppdaterad: 2019-11-13Bibliografiskt granskad

Open Access i DiVA

fulltext(1631 kB)30 nedladdningar
Filinformation
Filnamn FULLTEXT01.pdfFilstorlek 1631 kBChecksumma SHA-512
af30e53838829b14bc8a2b2c693447548e9fabf29302555a4dde994114be741640e70ecd1d015032f7f9242bdd84f0e0e4e991c79d9da5927edd82f0d9d3b02c
Typ fulltextMimetyp application/pdf

Övriga länkar

Förlagets fulltext

Personposter BETA

Silander, IsakHausmaninger, ThomasForssén, ClaytonAxner, Ove

Sök vidare i DiVA

Av författaren/redaktören
Silander, IsakHausmaninger, ThomasForssén, ClaytonAxner, Ove
Av organisationen
Institutionen för fysik
I samma tidskrift
Journal of Vacuum Science and Technology B: Nanotechnology and Microelectronics
Annan elektroteknik och elektronik

Sök vidare utanför DiVA

GoogleGoogle Scholar
Totalt: 30 nedladdningar
Antalet nedladdningar är summan av nedladdningar för alla fulltexter. Det kan inkludera t.ex tidigare versioner som nu inte längre är tillgängliga.

doi
urn-nbn

Altmetricpoäng

doi
urn-nbn
Totalt: 64 träffar
RefereraExporteraLänk till posten
Permanent länk

Direktlänk
Referera
Referensformat
  • apa
  • ieee
  • modern-language-association-8th-edition
  • vancouver
  • Annat format
Fler format
Språk
  • de-DE
  • en-GB
  • en-US
  • fi-FI
  • nn-NO
  • nn-NB
  • sv-SE
  • Annat språk
Fler språk
Utmatningsformat
  • html
  • text
  • asciidoc
  • rtf