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Tunable bulk acoustic wave resonators based on Ba0.25Sr0.75TiO3 thin films and a HfO2/SiO2 Bragg reflector
2011 (English)In: IEEE Transactions on Ultrasonics, Ferroelectrics and Frequency Control, ISSN 0885-3010, E-ISSN 1525-8955, Vol. 58, no 12, p. 2768-2771Article in journal (Refereed) Published
Abstract [en]

A switchable and tunable bulk acoustic wave resonator based on a paraelectric phase Ba0.25Sr0.75TiO3 thin film and an all-dielectric HfO2/SiO2 Bragg reflector is presented. The achieved tuning range (3.8%) and effective electromechanical coupling coefficient (7.1%) are the highest reported for solidly mounted tunable bulk acoustic wave resonators. The non-conductive Bragg reflector stack provides excellent integration possibilities.

Place, publisher, year, edition, pages
2011. Vol. 58, no 12, p. 2768-2771
National Category
Materials Engineering
Identifiers
URN: urn:nbn:se:umu:diva-140835OAI: oai:DiVA.org:umu-140835DiVA, id: diva2:1150773
Available from: 2017-10-19 Created: 2017-10-19 Last updated: 2018-06-09

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Berge, John

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