umu.sePublications
Change search
CiteExportLink to record
Permanent link

Direct link
Cite
Citation style
  • apa
  • ieee
  • modern-language-association-8th-edition
  • vancouver
  • Other style
More styles
Language
  • de-DE
  • en-GB
  • en-US
  • fi-FI
  • nn-NO
  • nn-NB
  • sv-SE
  • Other locale
More languages
Output format
  • html
  • text
  • asciidoc
  • rtf
Silicon substrate integration of BST based tunable TFBARs using all-dielectric SiO2/AlN Bragg reflectors
2010 (English)In: 10th Topical Meeting on Silicon Monolithic Integrated Circuits in RF Systems (SiRF 2010) - Digest of Papers, 2010, p. 41-44Conference paper, Published paper (Refereed)
Abstract [en]

Integration possibilities of BaxSr1-xTiO3 (BST) based tunable Thin Film Bulk Acoustic Wave Resonators (TFBAR) using all-dielectric SiO2/AlN Bragg reflectors deposited on a high resistivity silicon substrate are considered. SiO2/AlN reflectors withstand the high deposition temperature (>600C) of the BST films opening up possibilities for heterogeneous integration of complex microwave circuits. © 2010 IEEE.

Place, publisher, year, edition, pages
2010. p. 41-44
Keyword [en]
Acoustic Bragg reflector ferroelectric, FBAR, Induced piezoelectric effect, Si-integration, TFBAR
National Category
Materials Engineering
Identifiers
URN: urn:nbn:se:umu:diva-140839OAI: oai:DiVA.org:umu-140839DiVA, id: diva2:1150783
Conference
SiRF 2010, New Orleans, LA, USA
Available from: 2017-10-19 Created: 2017-10-19 Last updated: 2018-06-09

Open Access in DiVA

No full text in DiVA

Authority records BETA

Berge, John

Search in DiVA

By author/editor
Berge, John
Materials Engineering

Search outside of DiVA

GoogleGoogle Scholar

urn-nbn

Altmetric score

urn-nbn
Total: 30 hits
CiteExportLink to record
Permanent link

Direct link
Cite
Citation style
  • apa
  • ieee
  • modern-language-association-8th-edition
  • vancouver
  • Other style
More styles
Language
  • de-DE
  • en-GB
  • en-US
  • fi-FI
  • nn-NO
  • nn-NB
  • sv-SE
  • Other locale
More languages
Output format
  • html
  • text
  • asciidoc
  • rtf