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Gas equilibration gas modulation refractometry for assessment of pressure with sub-ppm precision
Umeå University, Faculty of Science and Technology, Department of Physics.
Umeå University, Faculty of Science and Technology, Department of Physics. National Metrology Institute VTT MIKES, Finland.
Umeå University, Faculty of Science and Technology, Department of Physics.
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2019 (English)In: Journal of Vacuum Science and Technology B: Nanotechnology and Microelectronics, ISSN 2166-2746, E-ISSN 2166-2754, Vol. 37, no 4, article id 042901Article in journal (Refereed) Published
Abstract [en]

Gas modulation refractometry (GAMOR) is a methodology that, by performing repeated reference assessments with the measurement cavity being evacuated while the reference cavity is held at a constant pressure, can mitigate drifts in dual Fabry-Perot cavity based refractometry. A novel realization of GAMOR, referred to as gas equilibration GAMOR, that outperforms the original realization of GAMOR, here referred to as single cavity modulated GAMOR (SCM-GAMOR), is presented. In this, the reference measurements are carried out by equalizing the pressures in the two cavities, whereby the time it takes to reach adequate conditions for the reference measurements has been reduced. This implies that a larger fraction of the measurement cycle can be devoted to data acquisition, which reduces white noise and improves on its short-term characteristics. The presented realization also encompasses a new cavity design with improved temperature stabilization and assessment. This has contributed to improved long-term characteristics of the GAMOR methodology. The system was characterized with respect to a dead weight pressure balance. It was found that the system shows a significantly improved precision with respect to SCM-GAMOR for all integration times. For a pressure of 4303 Pa, it can provide a response for short integration times (up to 10 min) of 1.5 mPa (cycle)1/2, while for longer integration times (up to 18 h), it shows an integration time-independent Allan deviation of 1mPa (corresponding to a precision, defined as twice the Allan deviation, of 0.5 ppm), exceeding the original SCM-GAMOR system by a factor of 2 and 8, respectively. When used for low pressures, it can provide a precision in the sub-mPa region; for the case with an evacuated measurement cavity, the system provided, for up to 40 measurement cycles (ca. 1.5 h), a white noise of 0.7 mPa (cycle)1/2, and a minimum Allan deviation of 0.15mPa. It shows a purely linear response in the 2.8-10.1 kPa range. This implies that the system can be used for the transfer of calibration over large pressure ranges with exceptional low uncertainty.

Place, publisher, year, edition, pages
American Institute of Physics (AIP), 2019. Vol. 37, no 4, article id 042901
National Category
Other Electrical Engineering, Electronic Engineering, Information Engineering
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URN: urn:nbn:se:umu:diva-165111DOI: 10.1116/1.5090860ISI: 000492053600016OAI: oai:DiVA.org:umu-165111DiVA, id: diva2:1369973
Available from: 2019-11-13 Created: 2019-11-13 Last updated: 2019-11-13Bibliographically approved

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Silander, IsakHausmaninger, ThomasForssén, ClaytonAxner, Ove

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