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Diffusion-isolated pressure equilibration for multigas refractometry
Umeå University, Faculty of Science and Technology, Department of Physics.ORCID iD: 0000-0001-5790-2185
Umeå University, Faculty of Science and Technology, Department of Physics. RISE Research Institutes of Sweden, Borås, Sweden.ORCID iD: 0000-0002-3261-9903
Umeå University, Faculty of Science and Technology, Department of Physics.ORCID iD: 0000-0002-8580-9700
RISE Research Institutes of Sweden, Borås, Sweden.
2026 (English)In: Journal of Vacuum Science and Technology B: Nanotechnology and Microelectronics, ISSN 2166-2746, E-ISSN 2166-2754, Vol. 44, no 3, article id 034201Article in journal (Refereed) Published
Abstract [en]

Fabry–Pérot refractometry is a leading technique for high-accuracy pressure realization; however, multigas operation is typically constrained by gas-handling complexity and the risk of cross-contamination. In this work, we investigate whether the pronounced difference in time scales between rapid pressure equilibration and the much slower molecular diffusion in long, narrow connections can be exploited to enable two connected Fabry–Pérot cavity-based refractometers to operate with different gases at the same pressure. Diffusion modeling based on Fick’s second law, together with experiments using two refractometers, shows that gas mixing can remain below 1 ppm for a variety of measurement times and pressures. These results demonstrate a simple and robust approach to simultaneous multigas refractometry at a common pressure without the need for physical separation hardware.

Place, publisher, year, edition, pages
American Vacuum Society , 2026. Vol. 44, no 3, article id 034201
National Category
Other Electrical Engineering, Electronic Engineering, Information Engineering
Identifiers
URN: urn:nbn:se:umu:diva-252693DOI: 10.1116/6.0005393ISI: 001728631500001Scopus ID: 2-s2.0-105034723429OAI: oai:DiVA.org:umu-252693DiVA, id: diva2:2060517
Funder
EU, Horizon EuropeSwedish Research Council, 621-2020-05105Vinnova, 2023-03347Available from: 2026-05-18 Created: 2026-05-18 Last updated: 2026-05-18Bibliographically approved

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Silander, IsakZakrisson, JohanAxner, Ove

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