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Tunable Solidly Mounted Thin Film Bulk Acoustic Resonators Based on BaxSr1-xTiO3 Films
2007 (English)In: IEEE Microwave and Wireless Components Letters, ISSN 1531-1309, E-ISSN 1558-1764, Vol. 17, no 9, p. 655-657Article in journal (Refereed) Published
Abstract [en]

Electrically tunable solidly mounted thin film bulk acoustic resonators based on BaxSr1-xTiO3 films are reported for the first time. The films are acoustically isolated from the silicon substrate by a Bragg reflector stack. Applying DC bias induces piezoelectric effect and an acoustic resonance at approximately 4 GHz. Under 10 V applied DC bias the resonance frequency of the resonators based on Ba0.25Sr0.75TiO3 films is tuned 1.2% to lower frequencies. The Q-factor of these resonators is approximately 120, and the electromechanical coupling coefficient is 0.5%. The resonant frequency of the BaTiO3 based resonators shifts upwards 1.3% under 10 V DC bias, and the -factor is approximately 30, with an electromechanical coupling coefficient of 6.2%.

Place, publisher, year, edition, pages
2007. Vol. 17, no 9, p. 655-657
National Category
Materials Engineering
Identifiers
URN: urn:nbn:se:umu:diva-140848OAI: oai:DiVA.org:umu-140848DiVA, id: diva2:1150769
Available from: 2017-10-19 Created: 2017-10-19 Last updated: 2018-06-09

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Berge, John

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